Large operation range: Z axis: 50mm R axis: ±360°
Large load: 5N/19N
Repeated positioning accuracy: Z axis: ±0.001mm R axis: ±0.03°
Screw diameter: φ6/8mm
Product advantage: high precision, high silence and miniaturization
Technical advantage: Can realize up and down straight motion rotary motion hollow adsorption
Application industry: 3C/ semiconductor/medical machinery