Cleanup support
Various test head/probe card connections
Loader: 2 loaders/automation support with AMHS
Head tilting device (probe clamp tilting device)
Chuck: normal temperature/high temperature/low temperature/(each low noise)
APC: The probe card is automatically replaced
Box ID reader
Wafer ID reader (front/back)
GB-IB ports
Wafer detector Network System (Veganet, Light-Veganet, Vega-Planet, GEM)
PCAS (probe card automatic setting)
Probe card PGV
