Operators and AMHS can be accessed simultaneously through separate manual and OHT loading ports
High storage density on the market
Automated marking management and traceability
Increased uptime of scanner/lithography unit
Reduce the rework cost of marking lines
Protect the mask from chemical contamination, haze and crystal growth
Increase exposure times to extend mask life
High memory density
Fully automatic mask processing
Reliable and safe handling reduces mask and film damage
Low cost of ownership (COO)
