Fully automatic wafer processing and testing improves efficiency
The XRF system has excellent detector sensitivity and high resolution
The XRF system is equipped with multi-capillary optics and is the pioneer in micropoint measurement technology
Accurate test diameter up to 10? Structure of m
Automatic pattern recognition accurate positioning measurement position
Multiple modes of operation; It can be measured manually if necessary
Flexible: Expansion bases are available for FOUP, SMIF, and wafer boxes for 6 ", 8 ", and 12 "wafers
